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SEMICONDUCTOR MARKET

SEMICONDUCTOR FAB EQUIPMENT

HIGH POWER SOLUTIONS FOR SEMICONDUCTOR CAPITAL EQUIPMENT

Astrodyne TDI is the leading provider of power solutions for many of today’s semiconductor capital equipment applications installed around the world.  Our engineers understand the need for highly reliable power solutions with precise output specifications and semiconductor industry specific qualifications such as SEMI F47 compliance.

Scaleable design: Up to 500kW

The Astrodyne TDI product portfolio applicable for semiconductor equipment OEMs spans the power range of 1200 watts to 500 kilo-watts with voltages up to 600V and current output up to 330A.  Our power modules can be configured in parallel or serial for large system scaling in standard or engineered enclosures or racks.

High speed digital control needs are factored in with interfaces such as Ethercat, Ethernet and CAN such that integration with host systems may be easily implemented.

Experience and technologies derived from decades of delivering power solutions to the Semiconductor Capital Equipment Industry

  • High Power:
    1200w - 500kW
  • High Reliability:
    Accelerated stress testing
  • Industrial AC Inputs:
    Three phase 380v - 480V
    Wide range 90V - 275VAC
  • Large Output Range:
    5V up to 600VDC
  • High precision voltage and current process control
  • Digital Contro:
    Ethercat, Ethernet, CAN, etc.
  • Parallel and serial system configurability for higher power, voltage, and output current
  • Hot-swap capable for fast maintenance
  • Niche Technologies:
    AC - AC switching
  • Battery backup integration
  • Value added system engineering for AC/DC power distribution and custom requirements

The power of Mission Critical semiconductor equipment applications including:

  • Ion implantation
  • Wafer annealing
  • Wire bonders
  • Backend chip test equipment
  • Electronic system test equipment
  • Hardware emulators
  • Metal organic vapor deposition (MOCVD)
  • Chemical-mechanical planarization (CMP)

Products

  • LIQUABLADE

    Liquid Cooled AC/DC

    • 1U, 16.5kW , Hot Plug
    • Output voltages from 60V to 180V DC
    • Optional programmable  current, voltage or power
    • 380V/480V three phase delta input

  • Mercury

    Air Cooled AC/DC

    • 800W – 4.3kW, Hot Plug
    • Output voltages from 12V – 400V
    • Fixed and Programmable Output
    • Universal AC Input of 90-264VAC
    • N+1 redundant systems

  • LSM

    Liquid Cooled DC/DC

    • 2.7KW - 4kW
    • 12V or 24V nominal output
    • 400V or 700V nominal input

  • Mercury 2u modules with Hot-Swap Shelf

    Mercury Flex - Programmable DC Voltage & Current Source

    • Programmable Voltage source options up to 400V
    • Programmable Current source up to 170A
    • Programmable Power Source up to 12kW in a 2U shelf
    • Ethernet or CAN Digital control interfaces
    • Hot Swap and N+1 redundancy maximizes uptime

  • LCE

    DC/AC Inverters

    • 400VA to  1.5kVA
    • 120V, 60Hz or 220V 50Hz
    • 24V or 48V nominal input
    • Hot plug shelf mount
    • N+1 redundant systems

  • ESPM

    Outdoor Sealed

    • 500W -2.5kW
    • Convection cooled IP67
    • 24V - 300V
    • Universal AC Input of 90-264VAC

  • Defender_indoor

    Cathodic Corrosion Protection Rectifiers

    • ICCP ( Impressed Current Cathodic Protection systems )
    • Indoor, outdoor or shipboard
    • 2.5kW – 15kW solutions

  • Dynaload

    Dynaload DC Electronic Loads

    • 800W – 12kW Unit
    • Air and Water Cooled

  • Custom power

    Custom Power

    • Industrial
    • Military
    • Aerospace
    • Medical

Robust Power Technologies

Our products are utilized in highly clean environments, highly contaminated environments, as well as installations with airborne conductive debris. Our robust power technologies have employed numerous cooling methods encompassing air cooled, sealed/convection cooled, and liquid/water cooled.