Delivering Accurate and Reliable Power to Electrostatic Chuck Systems

To kick things off, let's explore the vital function that electrostatic chucks serve in semiconductor manufacturing. These essential components securely hold wafers in position throughout a variety of processes. Electrostatic chucks are gaining popularity for their ability to use electrostatic force to grip delicate materials that can be easily damaged because they do not use mechanical constraints. In the space of electrostatic chucks, high voltage plays a crucial role in creating the electrostatic grip between the platen and wafer.  As we further explore the intricacies, it becomes clear that electrostatic chucks, alongside their power supply and RF filter requirements, play a crucial role in semiconductor manufacturing processes.

Electrostatic chucks are used in many front-end processes, such as lithography, deposition, etch, etc. With multiple chucksE-Chuck in Semiconductor Cap Equipment requiring multiple power supplies, the demand is high, and the increasing need for electronics drives the market growth.

The unique power solutions developed by AstrodyneTDI for electrostatic chucks focus on both high and low-temperature applications within semiconductor manufacturing processes. Our commitment to accuracy, precision, compactness, and adaptability sets us apart in the market, ensuring that our customers receive top-notch performance and reliability. With a keen eye on accuracy and power density, we aim to provide tailored solutions that meet the diverse needs of semiconductor manufacturers.

E-chuck power supply voltage requirements range from hundreds to thousands of volts. At Astrodyne TDI, our primary focus lies in applications up to 2500 volts. This range of voltage is where we have dedicated our focus and honed our expertise.

Astrodyne TDI's electrostatic chucks cater to both high and low-temperature applications. High temperature correlates to higher current demand at voltages up to 2500 volts and power outputs of 400 watts. Our high-power DC-to-DC converter ensures precision and reliability, catering to the diverse needs of semiconductor manufacturers. On the other end, low-temperature applications cater to lower current requirements, offering flexibility with voltages ranging from zero to 1500 volts at power levels up to 30W.

Astrodyne TDI DC-to-DC converters can also be adapted to global AC inputs by being deployed with off-the-shelf AC-DC power supplies. Astrodyne TDI can package these assemblies into a single-channel solution, streamlining the entire process.

E-chuck power supplies often require reverse polarity to smoothly and securely unclamp the wafer. The ability to reverse polarity effortlessly facilitates the handling of delicate wafers. 

Furthermore, the presence of plasma in these procedures may lead to RF leakage into the power supply. To counter this, we can develop solutions that effectively integrate RF filters to block the RF energy, guaranteeing minimal interference to both the power supply and the overall operation.

The demand for high-voltage power supplies and RF filters in this sector is on the rise, presenting numerous opportunities for Astrodyne TDI to excel and provide innovative solutions. With a focus on customer needs and industry demands, our innovative solutions stand out in the competitive landscape.
Reliability stands as the cornerstone of success in the semiconductor industry. Given the immense value of semiconductor manufacturing wafers, any disruption or damage can incur significant costs. This is why we place a premium on reliability, aiming to minimize interruptions and shield delicate wafers from harm. As dedicated partners in this specialized market, we boast a deep understanding and a proven track record of deploying systems that meet the most rigorous standards. Our unwavering commitment to excellence perfectly aligns with the needs of our esteemed customers and the unique demands of this industry.
As previously highlighted, collaborating with AstrodyneTDI brings forth key benefits such as impressive power density, precise polarity switching, and exceptional high-temperature performance. As a single vendor for RF filters and E Chuck power supplies, we aim to streamline the design process for our customers, allowing their engineers to focus on their expertise while we handle the power solutions. For additional information about our e-chuck capabilities please contact our team at
ESCape: High Temperature
Single Output +/- 1500V, 400W AC-DC
Power Supply
ESCape: Low Temperature
Single Output +/- 1000V, 25W DC-DC
Power Supply
ESCape E-Chuck Power Supplies (5)

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ESCape E-Chuck Power Supplies (3)

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