Semiconductor Fab Equipment

Manufacturing Power Supplies for Semiconductor Equipment

In semiconductor fabrication, it’s essential to have a consistent power supply, as power supplies are a critical component of semiconductor processing equipment. This ensures every step of the fabrication process is done correctly and completely. Our selection of power supplies for semiconductors offers reliability and superior performance. We provide a wide range of high-quality AC/DC and DC/DC power supply options, spanning from 1 watt to 500 kilowatts.

Choose Astrodyne TDI as your trusted source for all your power supply needs. Some of the solutions we offer include:

• Open frame: The open layout of this switching power supply provides ample cooling.
• Enclosed: Our enclosed power supplies protect your power source from the elements.
• Encapsulated: Encapsulated options are compatible with various configurations, and these models protect components from dust, moisture, and vibration.
• Boarhmount: These power supply modules offer power density and ease of manufacturing.
• External adapters: Our external and wall-mount adapters meet Energy Level VI standards.
• Rack-mount: We provide up to 500 kilowatts in a standard 19-inch rack-mount form to achieve air or liquid power.
• Ruggedized and Hazloc: Our ruggedized models can withstand extreme environments, including those that require solutions for Hazloc and the United States Military Standard (MIL-standard) certifications.
• Chassis-mount: These AC/DC models are encapsulated and come in medical-grade, ultra-miniature, and dual-output options.

Our scalable and efficient power solutions help enable reduced cost in semiconductor manufacturing by supporting higher yields and lower energy consumption.

Many of our power supplies feature digital control and interfaces, utilizing advanced software for process control and seamless integration with host systems, which is essential for modern semiconductor fab equipment.

Scalable Design for Various Projects

Astrodyne TDI is your go-to manufacturer of custom-fabricated equipment for various industries. Our commitment to quality design and build is evident in our products' field performance.

Our extensive range of power solutions for semiconductor equipment OEMs covers 1 watt to 500 kilowatts, with voltages up to +/- 1200V. These power modules offer the flexibility of parallel or serial configuration, allowing for seamless scalability in standard or engineered enclosures or racks. This scalability and integration are achieved through a method that optimizes modular design and standardized connection procedures, ensuring efficient expansion and compatibility.

To meet the high-speed digital control requirements, our power solutions are equipped with interfaces such as EtherCAT, Ethernet, and CANBus, enabling easy integration with host systems.

Experience the convenience and efficiency of our power solutions designed specifically for the semiconductor industry.

Semiconductor Fab Equipment Features

Find out what it's like when you merge experience and technologies from decades of delivering power solutions. At Astrodyne TDI, we always aim to provide customers in the Semiconductor Capital Equipment Industry with high-performing equipment. Here's how you can benefit from our manufacturing services:

• Bias/Housekeeping: 1W to 1200W
• High power: 1200W to 500kW
• High reliability: Accelerated stress testing
• Industrial AC inputs: Three-phase 380 to 480VAC, Single-phase 90V to 275VAC, Three-phase 208VAC
• Extensive output range: 5V up to 12000 VDC, high-precision voltage, and current process control
• Digital control: EtherCAT, Ethernet, CANBus, and more. Parallel and serial system configuration for higher power, voltage, and output current. Hot-swap for fast maintenance and improved uptime.
• Customization: AC-AC switching battery backup integration, value-added system engineering for AC/DC power distribution, and other custom requirements.

Applications of Astrodyne TDI Semiconductor Fab Equipment

If you need power supplies for semiconductor manufacturing, it's Atsrodyne TDI you can trust. Our expertise in semiconductor fab equipment is top-notch, delivering your ideal power for mission-critical applications. You can use our products for the following purposes:

• Ion implantation
• Wafer annealing
• Wire bonders – essential in the assembly process, performing wire bonding as part of assembling, packaging, and final testing of finished semiconductor dies.
• Die bonders – used in the assembly process for die bonding, a critical step before wire bonding and packaging.
• E-chucks
• Etch – utilizes specialized chambers and controlled gases to precisely remove material from the wafer surface.
• Backend chip test equipment – supports automated test equipment that runs electrical and environmental stress tests on fully packaged chips to identify and discard defective chips, ensuring only working chips proceed.
• Electronic system test equipment
• Hardware emulators
• Advanced packaging – involves packaging equipment that seals the fragile chip and wiring inside a protective casing.
• Metal-organic vapor deposition (MOCVD)
• Chemical-mechanical planarization (CMP) – CMP systems use a combination of chemical slurries and mechanical polishing pads to flatten and smooth the wafer surface.
• Heaters
  

  For example, in MOCVD or etch processes, a chamber is used to control the internal environment, introducing specific gases and maintaining precise temperature and pressure for uniform film deposition or material removal.

  Wafer dicing equipment slices the large circular wafer into individual rectangular chips (dies) as a key step before assembly and packaging.

EMI Filters for Semiconductor Equipment

Electromagnetic interference (EMI) is noise from an outside source that affects the electrical path and causes electronics to malfunction or stop working.

EMI filters are special tools that prevent devices from emitting stray signals from exiting onto the power line and affecting external equipment. They also allow low-level noise to pass through, ensuring devices maintain their proper function. EMI filters provide ample protection so unwanted external noises don't seriously damage equipment.

Astrodyne TDI carries a comprehensive portfolio of off-the-shelf EMI filter solutions. We also offer customized filters to suit your unique requirements, expertly crafted by our in-house engineering and design experts. We have different filter phases depending on the amount of attenuation or the filter's strength to stifle the noise. Some examples of the EMI filters you can get from us are:

• Single-phase filters
• Three-phase filters
• Industrial-grade filters

In addition, Astrodyne TDI is committed to providing ongoing support and guidance to help customers select and implement the most effective EMI filter solutions for their semiconductor fab equipment needs.

RF Filters for Semiconductor Equipment

Radiofrequency (RF) is similar to EMI in that they are both types of frequencies, but the two couldn't be more distinct. Understanding the key differences between EMI and RF is crucial in designing and operating these solutions.

Whereas EMI filters minimize unwanted electromagnetic interference, RF filters either allow or block specific radio frequencies. Another important point of distinction is that EMI filters work for a wide range of frequencies, including low frequencies (kilohertz to megahertz). In comparison, RF filters concentrate on higher frequencies (megahertz to kilohertz).

In terms of application, the main purpose of EMI filters is to protect sensitive equipment from noise generated by other devices or systems, while RF filters are commonly used to filter signals and ensure the clarity and quality of communication systems.

Astrodyne TDI partners with our customers to deliver turnkey RF filters in a variety of frequencies (350kHz, 13.56 MHz, 27.12 MHz, 40MHz) and a range of impedances.

Power Conversion Solutions

Power distribution units (PDUs) are highly versatile devices that provide power to multiple devices within a system. These advanced machines offer a range of capabilities tailored to suit your specific applications and environmental requirements.

In addition to their power distribution function, PDUs can also serve as power converters for semiconductor manufacturing, seamlessly converting AC to AC, AC to DC, and DC to AC. By consolidating multiple cords into a single power control box, PDUs reduce clutter and simplify wiring. Safety is paramount, so PDUs are equipped with emergency OFF (EMO) switches and emergency battery backup systems.

AC Distribution Boxes, a type of PDU, play a crucial role in safeguarding the system against surges, ground faults, and AC disruption. These devices offer various features including remote control and monitoring, circuit protection, emergency OFF (EMO) switches, and interlocks.

Contact Astrodyne TDI Today

Astrodyne TDI can provide semiconductor power supplies, filters, and PDUs for any job. With advanced manufacturing centers in New Jersey, California and China, our design and engineering teams can create the custom missing piece for your project.

You need a company you can trust. In addition to meeting SEMI F47 requirements, our state-of-the-art products meet worldwide safety and EMI standards, and our facilities are ISO 9001 and ISO 13485-certified.

Do you need a robust power solution for a demanding environment? Whether you need to discuss customization requirements, volume needs or other questions, our representatives are ready to accommodate your inquiries. Request a custom quote for your project today.