Semiconductor Fab Equipment

High Power Solutions for Semiconductor Capital Equipment

Astrodyne TDI is the leading provider of power solutions for various semiconductor equipment applications worldwide. Our engineers recognize the need for highly reliable power solutions with precise output specifications and semiconductor industry-specific standards such as SEMI F47 compliance.

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Semiconductor Fab Equipment

 

Scaleable Design: Up to 500KW

The Astrodyne TDI product portfolio applicable for semiconductor equipment OEMs spans the power range of 1200 watts to 500 kilo-watts with voltages up to 600V and current output up to 300A. Our power modules can be configured in parallel or serial for large system scaling in standard or engineered enclosures or racks.

High speed digital control needs are factored in with interfaces such as Ethercat, Ethernet and CAN such that integration with host systems may be easily implemented.

Experience and technologies from decades of delivering power solutions to the Semiconductor Capital Equipment Industry

High Power:
1200w - 500kW
 
High Reliability:
Accelerated stress testing
 
Industrial AC Inputs:
Three phase 380v - 480V
Wide range 90V - 275VAC
 
Large Output Range:
5V up to 600VD
High precision voltage and current process control
 
Digital Control:
Ethercat, Ethernet, CAN, etc.
Parallel and serial system configurability for higher power, voltage, and output current
Hot-swap capable for fast maintenance
 
Niche Technologies:
AC - AC switching
Battery backup integration
Value added system engineering for AC/DC power distribution and custom requirements

The power of Mission Critical Semiconductor Equipment applications including:

  • Ion implantation
  • Wafer annealing
  • Wire bonders
  • Backend chip test equipment
  • Electronic system test equipment
  • Hardware emulators
  • Metal organic vapor deposition (MOCVD)
  • Chemical-mechanical planarization (CMP)
  • Electronic system test equipment

Semiconductor Fab Equipment

 

Robust Power Technologies

Our products are utilized in highly clean environments, highly contaminated environments, as well as installations with airborne conductive debris. Our robust power technologies have employed numerous cooling methods encompassing air-cooled, sealed/convection cooled, and liquid/water-cooled.