Semiconductor Fab Equipment

Power and EMI/RF Filter Solutions for Semiconductor Capital Equipment

Astrodyne TDI is the leading provider of power and EMI/RF filter solutions for various semiconductor equipment applications worldwide. Our engineers recognize the need for highly reliable power solutions with precise output specifications and semiconductor industry-specific standards such as SEMI F47 compliance.

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Power Supplies for Semiconductor Manufacturing Equipment

When it comes to semiconductor power supplies, look no further than our team for reliable components and solutions. Astrodyne TDI provides a wide range of high-quality AC/DC and DC/DC power supply options, spanning from 1 watt to 500 kilowatts. Choose us as your trusted source for all your power supply needs.

  • Open frame: The open layout of this switching power supply provides ample cooling.
  • Enclosed: Our enclosed power supplies protect your power source from the elements.
  • Encapsulated: Encapsulated options are compatible with various configurations, and these models protect components from dust, moisture, and vibration.
  • Board-mount: These power supply modules offer power density and ease of manufacturing.
  • External adapters: Our external and wall-mount adapters meet Energy Level VI standards.
  • Rack-mount: We provide up to 500 kilowatts in a standard 19-inch rack-mount form to achieve air or liquid power.
  • Ruggedized and Hazloc: Our ruggedized models can withstand extreme environments, including those that require solutions for Hazloc and the United States Military Standard (MIL-) standard certifications.
  • Chassis-mount: These AC/DC models are encapsulated and come in medical-grade, ultra-miniature, and dual-output options.

Scalable Design: Up to 500KW

Our extensive range of power solutions for semiconductor equipment OEMs covers 1 watt to 500 kilowatts, with voltages up to +/- 1200V. These power modules offer the flexibility of parallel or serial configuration, allowing for seamless scalability in standard or engineered enclosures or racks.

To meet the high-speed digital control requirements, our power solutions are equipped with interfaces such as EtherCAT, Ethernet, and CANBus, enabling easy integration with host systems.

Experience the convenience and efficiency of our power solutions designed specifically for the semiconductor industry.

Experience and technologies from decades of delivering power solutions to the Semiconductor Capital Equipment Industry

  • Bias/ Housekeeping: 1W - 1200W
  • High Power: 1200W - 500kW
  • High Reliability: Accelerated stress testing
  • Industrial AC Inputs: Three-phase 380 - 480VAC, Single Phase 90V - 275VAC, Three Phase 208VAC
  • Extensive Output Range: 5V up to 1200VDC, High precision voltage, and current process control
  • Digital Control: EtherCAT, Ethernet, CANBus, etc., Parallel and serial system configuration for higher power, voltage, and output current, Hot-swap for fast maintenance, and improved uptime.
  • Customization: AC - AC switching Battery backup integration, Value-added system engineering for AC/DC power distribution, and other custom requirements

The ideal power for Mission Critical Semiconductor Equipment applications includes:

  • Ion implantation
  • Wafer annealing
  • Wire bonders
  • Die Bonders
  • E-chucks
  • Etch
  • Backend chip test equipment
  • Electronic system test equipment
  • Hardware emulators
  • Advanced Packaging
  • Metal-organic vapor deposition (MOCVD)
  • Chemical-mechanical planarization (CMP)
  • Heaters

EMI and RF Filters for Semiconductor Equipment

Electromagnetic interference (EMI) filters prevent devices from emitting stray signals from exiting onto the power line and affecting external equipment. At the same time, the filter allows low-level noise to pass through, which is necessary for the device to maintain proper function. Without proper protection from reliable EMI filters, this noise can seriously damage equipment.

Astrodyne TDI offers a comprehensive portfolio of off-the-shelf EMI afilter solutions. Our in-house engineering and design team experts will also customize the filters to match your project. Out EMI filters portfolio range from single-phase components to industrial-grade, three-phase filters that boast 2,500 amps and 690 volts. The distinction between filter phases is the amount of attenuation or the filter's strength to stifle the noise.

In the semiconductor industry, Radiofrequency interference (RFI) filters often appear on units that harness RFI to generate the heat to melt plasma. The filters prevent the RFI waves from leaking out of the chamber. Along with RF plasma injection, wafer pedestals generally include electrodes for an electrostatic chuck (“ESC”) and heating elements. The ESC power is generally in the 1-1.2kV range – either positive or negative polarity (sometimes both). Leakage from ESC power to heater power can occur depending on dielectric material resistivity ( which can get worse at high temperatures). Cables connecting ESC and heater power will leak RF energy from the chamber unless RF blocking filters are employed. Astrodyne TDI partners with our customers to deliver turn key RFI Filters in a variety of frequencies (350kHz, 13.56 MHz, 27.12 MHz, 40MHz) and a range of impedance's.

With Astrodyne TDI, you can find EMI or RFI filters for semiconductor fabrication equipment to ensure the equipment delivers ideal performance.

Power Conversion Solutions

Power distribution units (PDUs) are highly versatile devices that provide power to multiple devices within a system. These advanced machines offer a range of capabilities tailored to suit your specific applications and environmental requirements.

In addition to their power distribution function, PDUs can also serve as power converters for semiconductor manufacturing, seamlessly converting AC to AC, AC to DC, and DC to AC. By consolidating multiple cords into a single power control box, PDUs reduce clutter and simplify wiring. Safety is paramount, so PDUs are equipped with emergency OFF (EMO) switches and emergency battery backup systems.

AC Distribution Boxes, a type of PDU, play a crucial role in safeguarding the system against surges, ground faults, and AC disruption. These devices offer various features including remote control and monitoring, circuit protection, emergency OFF (EMO) switches, and interlocks.

Choose Astrodyne TDI for your power distribution needs in semiconductor fabrication. Our cutting-edge manufacturing facilities in New Jersey, California, and China enable our design and engineering teams to create custom solutions tailored to your project.

Trust is paramount, which is why our state-of-the-art products adhere to worldwide safety and EMI standards. Astrodyne TDI facilities are ISO 9001 and ISO 13485 certified, and our tools meet SEMI F47 requirements.

Power redundancy options are also available, providing peace of mind knowing that backup units can support the load in the event of a failure. Our power solutions are designed to withstand tough workspaces, even those with airborne conductive debris, ensuring the protection of your power source.

If you require a robust power solution for a demanding environment, contact us today to receive a personalized quote for your project.

Power Solutions for Semiconductor Fabrication

Astrodyne TDI can provide you with semiconductor power supplies, filters, and PDUs for any job. With advanced manufacturing centers in New Jersey, California and China, our design and engineer teams can create the custom missing piece for your project.

You need a company you can trust. Our state-of-the-art products meet worldwide safety and EMI standards, and our facilities are ISO 9001 and ISO 13485 certified. Astrodyne TDI tools also meet SEMI F47 requirements.

Astrodyne TDI's solutions also offer power redundancy options. Operate with confidence, knowing that backup units can support the load until your technicians can replace the failed unit if one unit fails. These power solutions can perform in environments with contaminants like airborne conductive debris to protect your power source in tough workspaces.

Do you need a robust power solution for a demanding environment? Contact us today to receive a custom quote for your project.

Semiconductor Fab Equipment


Robust Power Technologies

Our products are utilized in highly clean environments, highly contaminated environments, as well as installations with airborne conductive debris. Our robust power technologies have employed numerous cooling methods encompassing air-cooled, sealed/convection cooled, and liquid/water-cooled.